Process parameters optimization for precision trim punch used in integrated circuit manufacturing by using factorial analysis method

Pao Yue-kong Library Electronic Theses Database

Process parameters optimization for precision trim punch used in integrated circuit manufacturing by using factorial analysis method

 

Author: Ho, Siu-fat
Title: Process parameters optimization for precision trim punch used in integrated circuit manufacturing by using factorial analysis method
Degree: M.Sc.
Year: 1994
Subject: Integrated circuits -- Design and construction -- Data processing
Factorial analysis
Hong Kong Polytechnic -- Dissertations
Department: Multi-disciplinary Studies
Pages: 1 v. (various pagings) : ill. ; 30 cm
Language: English
InnoPac Record: http://library.polyu.edu.hk/record=b1158278
URI: http://theses.lib.polyu.edu.hk/handle/200/3700
Abstract: Trimming is one of the major process in the Integrated Circuit Assembly. In this study, six key control factors in trimming are selected. By using the Factorial Analysis Method, an Experimental Matrix is set up. Through a limited number of controlled experiments, the optimum parameter setting is established. Meanwhile, importance of each factor is also studied by using the ANOVA. Verification experiment was performed to ensure the validity of the experimental result. The optimum parameter settings were also compared with the traditional knowledge of metal cutting with no major difference. By considering the practical constraints in manufacturing environment together with the optimum parameter setting, it is concluded that polished cutting die insert surface, angled cutting edge punch, inclined grinding direction relative to cutting edge will prolong tool life of a cutting punch. Furthermore, well controlled clamping clearance, punch penetration, and land size in the die will contribute to longer punch tool life.

Files in this item

Files Size Format
b11582789.pdf 2.678Mb PDF
Copyright Undertaking
As a bona fide Library user, I declare that:
  1. I will abide by the rules and legal ordinances governing copyright regarding the use of the Database.
  2. I will use the Database for the purpose of my research or private study only and not for circulation or further reproduction or any other purpose.
  3. I agree to indemnify and hold the University harmless from and against any loss, damage, cost, liability or expenses arising from copyright infringement or unauthorized usage.
By downloading any item(s) listed above, you acknowledge that you have read and understood the copyright undertaking as stated above, and agree to be bound by all of its terms.

     

Quick Search

Browse

More Information