Fabrication of nitride and oxide films using pulsed laser deposition technique

Pao Yue-kong Library Electronic Theses Database

Fabrication of nitride and oxide films using pulsed laser deposition technique


Author: Chan, Hon-kit Robin
Title: Fabrication of nitride and oxide films using pulsed laser deposition technique
Year: 2000
Subject: Thin films
Pulsed laser deposition
Hong Kong Polytechnic University -- Dissertations
Department: Multi-disciplinary Studies
Dept. of Applied Physics
Pages: v, 70 leaves : ill. ; 30 cm
Language: English
InnoPac Record: http://library.polyu.edu.hk/record=b1524929
URI: http://theses.lib.polyu.edu.hk/handle/200/4526
Abstract: High quality crystalline YBCO thin films have been fabricated by pulsed laser deposition method. Single phase and multi phases of YBCO films grown on silicon substrates have been obtained. Different multi-buffering layers have been used for facilitating the deposition of YBCO onto the Si substrate. Total two sets of buffering layers have been used. One set consists of Titanium Nitride (TiN) and Strontuim Titanium Oxide, SrTiO3 (STO) while another set consists of Titanium Nitride (TiN) and Magnesium Oxide (MgO). Based on these buffering layers, two different configurations of heterostructures have been obtained namely the YBCO/STO/TiN/Si and YBCO/MgO/TiN/Si. Both of them are found to behave differently at different deposition condition. At high deposition temperature (720) of TiN, single phase of YBCO are found to be deposited on both heterostructures, but when TiN was deposited at low temperature (580), it favored two phases of YBCO to be deposited on the heterostructure of YBCO/STO/TiN/Si. However, there is only one phase found at another heterostructure YBCO /MgO/TiN/Si.

Files in this item

Files Size Format
b15249293.pdf 2.209Mb PDF
Copyright Undertaking
As a bona fide Library user, I declare that:
  1. I will abide by the rules and legal ordinances governing copyright regarding the use of the Database.
  2. I will use the Database for the purpose of my research or private study only and not for circulation or further reproduction or any other purpose.
  3. I agree to indemnify and hold the University harmless from and against any loss, damage, cost, liability or expenses arising from copyright infringement or unauthorized usage.
By downloading any item(s) listed above, you acknowledge that you have read and understood the copyright undertaking as stated above, and agree to be bound by all of its terms.


Quick Search


More Information