Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor | Department of Applied Physics | en_US |
| dc.creator | Hau, Fei-fei | - |
| dc.identifier.uri | https://theses.lib.polyu.edu.hk/handle/200/3403 | - |
| dc.language | English | en_US |
| dc.publisher | Hong Kong Polytechnic University | - |
| dc.rights | All rights reserved | en_US |
| dc.title | Heteroepitaxial growth of lead magnesium niobate-lead titanate thin films by pulsed laser deposition method | en_US |
| dcterms.abstract | In the present research we have used pulsed laser deposition (PLD) method to prepare super high-k (1-x)[Pb(Mg1/3Nb2/3)O3]-x[PbTiO3] (PMN1-x-PTx) dielectric thin films for future high-density dynamic random access memory (DRAM) applications. PMN1-x-PTx, films with x = 0.1 and 0.35 have been grown on various substrates with La0.7Sr0.3MnO3 (LSMO) and BaPbO3 (BPO) conducting oxides as well as Pt bottom electrodes. Conditions for heteroepitaxial growth of PMN-PT films have been identified. Structural and electrical properties of all these films have been carefully evaluated and compared. Integration of PMN-PT super high-k dielectric films with Si has been attempted via Pt and TiN buffer layers. Good structural quality PMN-PT/Pt/Si, PMN-PT/LSMO/Pt/Si and PMN-PT/BPO/Pt/Si heterostructures have been obtained. In addition, heteroepitaxial (001)PMN-PT | en_US |
| dcterms.abstract | (001)LSMO | en_US |
| dcterms.abstract | (001)MgO | en_US |
| dcterms.abstract | (001)TiN | en_US |
| dcterms.abstract | (001)Si has been demonstrated. Our results also reveal that the use of lead based oxide electrode (BPO) has reduced the dielectric leakage current. A maximum room temperature dielectric constant of 1750 at 10 kHz and a minimum leakage current of 6.78x10-9 A/cm2 at 1V have been recorded. | en_US |
| dcterms.extent | v, 102 leaves : ill. ; 30 cm | en_US |
| dcterms.isPartOf | PolyU Electronic Theses | en_US |
| dcterms.issued | 2002 | en_US |
| dcterms.educationalLevel | All Master | en_US |
| dcterms.educationalLevel | M.Phil. | en_US |
| dcterms.LCSH | Hong Kong Polytechnic University -- Dissertations | en_US |
| dcterms.LCSH | Thin films | en_US |
| dcterms.LCSH | Pulsed laser deposition | en_US |
| dcterms.accessRights | open access | en_US |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| b16760712.pdf | For All Users | 3.29 MB | Adobe PDF | View/Open |
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