Author: | Ho, Siu-fat |
Title: | Process parameters optimization for precision trim punch used in integrated circuit manufacturing by using factorial analysis method |
Degree: | M.Sc. |
Year: | 1994 |
Subject: | Integrated circuits -- Design and construction -- Data processing Factorial analysis Hong Kong Polytechnic -- Dissertations |
Department: | Multi-disciplinary Studies |
Pages: | 1 v. (various pagings) : ill. ; 30 cm |
Language: | English |
Abstract: | Trimming is one of the major process in the Integrated Circuit Assembly. In this study, six key control factors in trimming are selected. By using the Factorial Analysis Method, an Experimental Matrix is set up. Through a limited number of controlled experiments, the optimum parameter setting is established. Meanwhile, importance of each factor is also studied by using the ANOVA. Verification experiment was performed to ensure the validity of the experimental result. The optimum parameter settings were also compared with the traditional knowledge of metal cutting with no major difference. By considering the practical constraints in manufacturing environment together with the optimum parameter setting, it is concluded that polished cutting die insert surface, angled cutting edge punch, inclined grinding direction relative to cutting edge will prolong tool life of a cutting punch. Furthermore, well controlled clamping clearance, punch penetration, and land size in the die will contribute to longer punch tool life. |
Rights: | All rights reserved |
Access: | restricted access |
Files in This Item:
File | Description | Size | Format | |
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b11582789.pdf | For All Users (off-campus access for PolyU Staff & Students only) | 2.62 MB | Adobe PDF | View/Open |
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