Author: Ho, Siu-fat
Title: Process parameters optimization for precision trim punch used in integrated circuit manufacturing by using factorial analysis method
Degree: M.Sc.
Year: 1994
Subject: Integrated circuits -- Design and construction -- Data processing
Factorial analysis
Hong Kong Polytechnic -- Dissertations
Department: Multi-disciplinary Studies
Pages: 1 v. (various pagings) : ill. ; 30 cm
Language: English
Abstract: Trimming is one of the major process in the Integrated Circuit Assembly. In this study, six key control factors in trimming are selected. By using the Factorial Analysis Method, an Experimental Matrix is set up. Through a limited number of controlled experiments, the optimum parameter setting is established. Meanwhile, importance of each factor is also studied by using the ANOVA. Verification experiment was performed to ensure the validity of the experimental result. The optimum parameter settings were also compared with the traditional knowledge of metal cutting with no major difference. By considering the practical constraints in manufacturing environment together with the optimum parameter setting, it is concluded that polished cutting die insert surface, angled cutting edge punch, inclined grinding direction relative to cutting edge will prolong tool life of a cutting punch. Furthermore, well controlled clamping clearance, punch penetration, and land size in the die will contribute to longer punch tool life.
Rights: All rights reserved
Access: restricted access

Files in This Item:
File Description SizeFormat 
b11582789.pdfFor All Users (off-campus access for PolyU Staff & Students only)2.62 MBAdobe PDFView/Open


Copyright Undertaking

As a bona fide Library user, I declare that:

  1. I will abide by the rules and legal ordinances governing copyright regarding the use of the Database.
  2. I will use the Database for the purpose of my research or private study only and not for circulation or further reproduction or any other purpose.
  3. I agree to indemnify and hold the University harmless from and against any loss, damage, cost, liability or expenses arising from copyright infringement or unauthorized usage.

By downloading any item(s) listed above, you acknowledge that you have read and understood the copyright undertaking as stated above, and agree to be bound by all of its terms.

Show full item record

Please use this identifier to cite or link to this item: https://theses.lib.polyu.edu.hk/handle/200/3700