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dc.contributorDepartment of Applied Physicsen_US
dc.creatorZhang, Yu-
dc.identifier.urihttps://theses.lib.polyu.edu.hk/handle/200/4310-
dc.languageEnglishen_US
dc.publisherHong Kong Polytechnic University-
dc.rightsAll rights reserveden_US
dc.titleStudy of PZT multilayer piezoelectric transformersen_US
dcterms.abstractTwo types of lead zirconate titanate (PZT) multilayer structures have been investigated in this work. The first one, which consisted of thick PZT films fabricated by roll-casting and platinum (Pt) interleaving electrodes, was sintered at high temperature (1280oC). Thickness mode and length mode multilayer transformers have been fabricated from this type of multilayer structure and tested. The second type of multilayer PZT structure was fabricated by a sol-gel technique. A conductive oxide, lanthanum nickel oxide (LNO), was used as the electrode and the PZT/LNO multilayers were co-fired at below 650oC to make the process compatible with the integrated circuit (IC) technology. Original contributions reported in this thesis included: (1) Besides fabricating and evaluating PZT multilayer transformers based on the usual thickness mode, a new length mode multilayer transformer has been fabricated and its performance characterized. (2) A PZT/LNO multilayer structure was studied. A buffer layer consisting of a mixture of PZT and LNO was introduced at the interface to enhance the adhesion between the PZT and LNO. (3) To fabricate LNO films thick enough to be used as electrode, a modified sol-gel process has been used. LNO powder was introduced into the LNO sol-gel solution to induce a seeding effect in the film formation process and the annealing temperature has been reduced.en_US
dcterms.extentxv, 122 leaves : ill. ; 30 cmen_US
dcterms.isPartOfPolyU Electronic Thesesen_US
dcterms.issued2001en_US
dcterms.educationalLevelAll Masteren_US
dcterms.educationalLevelM.Phil.en_US
dcterms.LCSHElectric transformersen_US
dcterms.LCSHPiezoelectric materialsen_US
dcterms.LCSHHong Kong Polytechnic University -- Dissertationsen_US
dcterms.accessRightsopen accessen_US

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Please use this identifier to cite or link to this item: https://theses.lib.polyu.edu.hk/handle/200/4310