| Author: | Luk, Man Yu Andrew |
| Title: | A compact planar motion system with flexure bearings and magnetic position sensors |
| Degree: | M.Sc. |
| Year: | 2013 |
| Subject: | Integrated circuits -- Design and construction Hong Kong Polytechnic University -- Dissertations |
| Department: | Department of Mechanical Engineering |
| Pages: | xvi, 134 leaves : ill. (some col.) ; 30 cm. |
| Language: | English |
| Abstract: | In semiconductor industry, integrated circuit (IC) probing is one of the most important processes to evaluate the performance and ensure the quality of electronic devices. In order to achieve high throughput and reliability, an innovative planar motion platform with flexural bearings and magnetic encoders is developed. The planar motion platform included two pairs of flexural bearings which enable precise X-Y positioning in a compact size. The 3μm repeatability and 20μm position accuracy can be achieved with the proposed mechanical system. Moreover, a new Voice Coil Motor (VCM), which provides two directional forces simultaneously in one coil, and a magnetic encoder, which provides low cost solution for position feedback, are used in the proposed system. In order to improve the system performance with a stable and rapid system response, a PID controller is implemented for the prototype system. Swept-sine test is conducted on the experimental system to identify the actual system behaviour for the PID controller and filter design. However, the system performance is degraded due to the predictable non-linearity of the motor force constant, and the system parameters change because of the assembly variation. By the reason, a Model-Reference Adaptive System (MRAS) is also proposed to further improve the system dynamics and the steady state response. Numerical simulation of the proposed MRAS is also performed to evaluate the system performance. The superior performance of MRAS is found in the simulation which outperforms the conventional PID controller on handling the non-linearity, the system parameter variation and the disturbance injection. |
| Rights: | All rights reserved |
| Access: | restricted access |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| b25979504.pdf | For All Users (off-campus access for PolyU Staff & Students only) | 3.24 MB | Adobe PDF | View/Open |
Copyright Undertaking
As a bona fide Library user, I declare that:
- I will abide by the rules and legal ordinances governing copyright regarding the use of the Database.
- I will use the Database for the purpose of my research or private study only and not for circulation or further reproduction or any other purpose.
- I agree to indemnify and hold the University harmless from and against any loss, damage, cost, liability or expenses arising from copyright infringement or unauthorized usage.
By downloading any item(s) listed above, you acknowledge that you have read and understood the copyright undertaking as stated above, and agree to be bound by all of its terms.
Please use this identifier to cite or link to this item:
https://theses.lib.polyu.edu.hk/handle/200/6937