| Author: | Hau, Fei-fei |
| Title: | Heteroepitaxial growth of lead magnesium niobate-lead titanate thin films by pulsed laser deposition method |
| Degree: | M.Phil. |
| Year: | 2002 |
| Subject: | Hong Kong Polytechnic University -- Dissertations Thin films Pulsed laser deposition |
| Department: | Department of Applied Physics |
| Pages: | v, 102 leaves : ill. ; 30 cm |
| Language: | English |
| Abstract: | In the present research we have used pulsed laser deposition (PLD) method to prepare super high-k (1-x)[Pb(Mg1/3Nb2/3)O3]-x[PbTiO3] (PMN1-x-PTx) dielectric thin films for future high-density dynamic random access memory (DRAM) applications. PMN1-x-PTx, films with x = 0.1 and 0.35 have been grown on various substrates with La0.7Sr0.3MnO3 (LSMO) and BaPbO3 (BPO) conducting oxides as well as Pt bottom electrodes. Conditions for heteroepitaxial growth of PMN-PT films have been identified. Structural and electrical properties of all these films have been carefully evaluated and compared. Integration of PMN-PT super high-k dielectric films with Si has been attempted via Pt and TiN buffer layers. Good structural quality PMN-PT/Pt/Si, PMN-PT/LSMO/Pt/Si and PMN-PT/BPO/Pt/Si heterostructures have been obtained. In addition, heteroepitaxial (001)PMN-PT (001)LSMO (001)MgO (001)TiN (001)Si has been demonstrated. Our results also reveal that the use of lead based oxide electrode (BPO) has reduced the dielectric leakage current. A maximum room temperature dielectric constant of 1750 at 10 kHz and a minimum leakage current of 6.78x10-9 A/cm2 at 1V have been recorded. |
| Rights: | All rights reserved |
| Access: | open access |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| b16760712.pdf | For All Users | 3.29 MB | Adobe PDF | View/Open |
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